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Likarolo tse ling tsa Ceramic bakeng sa Lisebelisoa tsa Semiconductor Probe
Li entsoe ka ho hatelloa ka mokhoa o batang oa isostatic le ho siloa tlas'a mocheso o phahameng, ebe li etsoa ka mochini o nepahetseng le ho bentšitsoe, likarolo tse ling tsa letsopa li ka fihlela litlhoko life kapa life tse thata tsa lisebelisoa tsa semiconductor ka likarolo tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ea mocheso le ho kenya mocheso. Li-ceramic li ka sebetsa mefuteng e mengata ea lisebelisoa tsa tlhahiso ea semiconductor tse nang le boemo ba mocheso o phahameng, khase ea vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Sekepe sa Lisebelisoa tsa Semiconductor sa Ceramic Plate
Li entsoe ka ho hatelloa ka mokhoa o batang oa isostatic le ho siloa tlas'a mocheso o phahameng, ebe li etsoa ka mochini o nepahetseng le ho bentšitsoe, likarolo tse ling tsa letsopa li ka fihlela litlhoko life kapa life tse thata tsa lisebelisoa tsa semiconductor ka likarolo tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ea mocheso le ho kenya mocheso. Li-ceramic li ka sebetsa mefuteng e mengata ea lisebelisoa tsa tlhahiso ea semiconductor tse nang le boemo ba mocheso o phahameng, khase ea vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Lisebelisoa tsa Semiconductor Likarolo tsa Ceramic Spare
Li entsoe ka ho hatelloa ka mokhoa o batang oa isostatic le ho siloa tlas'a mocheso o phahameng, ebe li etsoa ka mochini o nepahetseng le ho bentšitsoe, likarolo tse ling tsa letsopa li ka fihlela litlhoko life kapa life tse thata tsa lisebelisoa tsa semiconductor ka likarolo tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ea mocheso le ho kenya mocheso. Li-ceramic li ka sebetsa mefuteng e mengata ea lisebelisoa tsa tlhahiso ea semiconductor tse nang le boemo ba mocheso o phahameng, khase ea vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Lesale la Tiiso la Alumina Ceramic le Hloekileng ka ho Fetisisa bakeng sa ho Tiisoa ha Kamore ea Mocheso o Phahameng
Lesale la tiiso la St.Cera la ceramic le entsoe e le mokhoa o mong oa ho sebelisa masale a polymer O libakeng tse feteletseng moo li-elastomer li senyehang. Le entsoe ka alumina ea 99.8% e hloekileng haholo (Al₂O₃), lesale lena la tiiso le tiileng le sebelisoa lits'ebetsong tsa ho tiisa tse sa fetoheng - hangata le kopantsoe le gasket ea tšepe e bonolo kapa ea graphite - ho fana ka tšireletso e tšepahalang ea vacuum kapa khase mochesong o fihlang ho 800°C le libakeng tse mabifi tsa plasma kapa tsa lik'hemik'hale. Thepa ena ha e na khase e tsoang, matla a phahameng a khatello (matla a tlase a ho flexural 361 MPa), le ho se sebetse hantle ha lik'hemik'hale (ho hanela li-halogen, li-acid le li-alkali ntle le HF). Libaka tsa ho tiisa tse nang le mahlakore a nepahetseng (bophara ≤5 μm, bohlasoa ba bokaholimo Ra ≤0.2 μm) li netefatsa hore ho kopana ha tšepe kapa likarolo tsa ceramic hoa dutla.
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Lesale la ho Tsepamisa la Kamore ea Alumina e Hloekileng ka ho Fetisisa bakeng sa Litsamaiso tsa Plasma Etch le CVD
Lesale la ho tsepamisa maikutlo la kamore ea St.Cera ke karolo ea bohlokoa ea sesebelisoa sa ts'ebetso e sebelisoang lisebelisoa tsa semiconductor tsa plasma etch, CVD, le PVD. E entsoe ka alumina ea 99.8% e hloekileng haholo (Al₂O₃), lesale le potoloha lehlakore la wafer ho thibela plasma le ho ntlafatsa kabo ea ion angular, ka hona le ntlafatsa ho tšoana ha etch holim'a bokaholimo ba wafer. Thepa e fana ka khanyetso e ikhethang ea plasma, matla a phahameng a dielectric (15×10⁶ V/m), le botsitso ba mocheso ho fihlela ho 1600°C, ho netefatsa ts'epo ea nako e telele libakeng tsa plasma tse matla tse thehiloeng ho fluorine kapa chlorine. ID/OD e sitsitsoeng hantle le ho ba bataletse (≤10 μm) li nolofalletsa ho beha moeli oa wafer hantle, ho fokotsa liphoso tsa moeli le tlhahiso ea likaroloana.
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Lesale la Ceramic la Alumina le Hloekileng ka ho Fetisisa bakeng sa Likamore tsa Ts'ebetso ea CVD / PVD
Lesale la letsopa la St.Cera le etselitsoe ka ho khetheha ho sebelisoa likamoreng tsa ts'ebetso tsa CVD (Chemical Vapor Deposition) le PVD (Physical Vapor Deposition). Lesale lena le entsoe ka 99.8% alumina e hloekileng haholo (Al₂O₃), lesale lena le sebetsa e le karolo ea kamore, lesale la ho tsepamisa mohopolo, kapa karolo ea kit ea ts'ebetso ho thibela plasma le ho sireletsa mabota a kamore hore a se ke a khoholeha. Thepa ena e fana ka khanyetso e ntle ea plasma, matla a phahameng a dielectric (15×10⁶ V/m), le botsitso ba mocheso ho fihlela ho 1600°C, ho netefatsa bophelo bo bolelele ba ts'ebeletso libakeng tse matla tsa plasma tse thehiloeng ho fluorine. Mamello e nepahetseng ea litekanyo (± 0.05 mm ho ID/OD) le ho ba sephara (≤10 μm) li nolofalletsa ho beha moeli oa wafer ka mokhoa o tsitsitseng, ho ntlafatsa ho ts'oana ha deposition le ho fokotsa tlhahiso ea likaroloana.
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Bernoulli Ceramic End Effector — Ho Sebetsana le Wafer e sa Kopaneng le e Senyehileng bakeng sa Wafer e Nyenyane le e Fokolang Hantle
Sesebediswa sa ho qetela sa ceramic sa St.Cera's Bernoulli se sebedisa aerodynamic lift ho sebetsana le di-wafer ntle le ho ama mmele. Se entswe ka alumina ya 99.8% e hlwekileng haholo (Al₂O₃) kapa silicon carbide (SiC), se na le di-nozzle tse entsweng ka nepo tse ntshang kgase e hatelletsoeng ho etsa filimi e tshesane ya moya pakeng tsa sesebediswa sa ho qetela le wafer. Molao-motheo ona wa ho se ame o fedisa tshilafatso ya lehlakore le ka morao, ho qhaqha ha lehlakore, le tshenyo ya bokahodimo, e leng se etsang hore e be e loketseng di-wafer tse tshesane (≤100 μm), tse pshatlehang habonolo, kapa tse sothehileng. Substrate ya ceramic e fana ka matla a ho thiba a phahameng (361 MPa bakeng sa Al₂O₃; ho fihlela ho 550–600 MPa bakeng sa SiC), boima bo tlase, le botsitso bo botle ba sebopeho, ho netefatsa hore ho ka phetwa sebaka dirobotong tsa phetisetso ya wafer tse lebelo le hodimo.
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Likarolo tsa Ceramic tsa Alumina tse Hloekileng ka ho Fetisisa bakeng sa Likopo tsa Semiconductor le tsa Liindasteri
St.Cera e hlahisa likarolo tsa letsopa tsa alumina e entsoeng ka mokhoa o nepahetseng (Al₂O₃) ho latela litlhaloso tsa bareki. Ka ho sebelisa alumina e hloekileng haholo ea 99.8%, likarolo tsena li fana ka matla a matle a ho flexural (361 MPa), ho thatafala ho hoholo (16 GPa), le matla a ikhethang a dielectric (15×10⁶ V/m). E etselitsoe lisebelisoa tsa semiconductor, likopano tse sa tsofaleng, li-insulator tsa motlakase, le lisebelisoa tsa mocheso o phahameng, thepa ena e fana ka ho monya metsi ho batla ho se na letho (0%) le coefficient ea katoloso ea mocheso ea 7.2×10⁻⁶/℃, ho netefatsa botsitso ba litekanyo tlas'a maemo a feteletseng.
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Porous Ceramic Vacuum Chuck bakeng sa ho Sebetsana le Wafer e Kobehileng
Sekotwana sa letsopa se nang le masoba sa St.Cera se entsoe ka alumina e hloekileng haholo e nang le masoba a bulehileng a lekanang a 30–45% le boholo ba masoba a tlohang ho 10 ho isa ho 100 μm. Ho fapana le li-chuck tse tloaelehileng tse nang le masoba, bokaholimo ba masoba bo fana ka vacuum e arolelanoang ho pholletsa le wafer eohle ka morao, e tšoara hantle li-wafer tse sothehileng, tse tšesaane, kapa tse se nang letho ntle le ho phahamisoa kapa ho robeha ka bohale. Vacuum e bonolo (e ka fetoloang ka restrictor) e boetse e thibela ho tšoaea ka morao.
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Sekoti sa Ceramic Vacuum Chuck se Thehiloeng ho Alumina bakeng sa ho Sebetsana le Wafer e Nyenyane
Sekotwana sa St.Cera se nang le masoba se entsoeng ka alumina se entsoe ka 99.6% Al₂O₃ e hloekileng haholo e nang le masoba a bulehileng a laoloang a 30–45% le boholo ba masoba a lekanang bo tlohang ho 10 ho isa ho 50 μm. Ho fapana le li-chuck tse nang le masoba, bokaholimo ba masoba bo fana ka vacuum e arolelanoang ho pholletsa le wafer eohle ka morao, ho felisa matšoao a bohale le ho nolofalletsa ho tšoara ka bonolo li-wafer tse tšesaane haholo (≤100 μm) kapa tse sothehileng. Thepa ena e fana ka matla a ho thiba ≥250 MPa le botsitso ba mocheso ho fihlela ho 400°C moeeng.
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Poleiti ea Kabo ea Khase ea Alumina bakeng sa CVD/PVD Showerhead
Poleiti ea kabo ea khase ea St.Cera (shaoara) e entsoe ka mokhoa o nepahetseng ho tsoa ho alumina ceramic ea 99.8% e hloekileng haholo. E na le mefuta e mengata ea masoba a manyane (bophara ba 0.3–1.5 mm) a netefatsang hore khase e phalla ka mokhoa o ts'oanang holim'a wafer nakong ea lits'ebetso tsa CVD, PVD, kapa ALD. Matla a phahameng a dielectric a poleiti (>15×10⁶ V/m) le khanyetso ea plasma li etsa hore e be ea bohlokoa bakeng sa ho kenngoa ha filimi e tšesaane ea semiconductor.
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Pin e Tšehetsang ea Ceramic bakeng sa Lisebelisoa tsa Ts'ebetso ea Semiconductor
Li-pin tse tšehetsang tsa St.Cera's ceramic (tse tsejoang hape e le li-pin tse phahamisang kapa li-pin tse tšehetsang) li sebelisoa likamoreng tsa ts'ebetso ea semiconductor ho phahamisa li-wafer kapa li-substrate nakong ea ho sebetsana, ho futhumatsa, kapa ho pholisa. Li entsoe ka 99.8% alumina kapa silicon nitride, li-pin tsena li fana ka matla a phahameng a ho hatella, botsitso ba mocheso, le ho hanyetsa lik'hemik'hale. Moralo oa hemispherical kapa o bataletseng o thibela ho ngoapa ha li-wafer.
