Poleiti ea Kabo ea Khase ea Alumina bakeng sa CVD/PVD Showerhead
Poleiti ea kabo ea khase ea St.Cera (shaoara) e entsoe ka mokhoa o nepahetseng ho tsoa ho alumina ceramic ea 99.8% e hloekileng haholo. E na le mefuta e mengata ea masoba a manyane (bophara ba 0.3–1.5 mm) a netefatsang hore khase e phalla ka mokhoa o ts'oanang holim'a wafer nakong ea lits'ebetso tsa CVD, PVD, kapa ALD. Matla a phahameng a dielectric a poleiti (>15×10⁶ V/m) le khanyetso ea plasma li etsa hore e be ea bohlokoa bakeng sa ho kenngoa ha filimi e tšesaane ea semiconductor.
Litlhaloso:
| Thepa | Boleng |
| Thepa | 99.8% Al₂O₃ kapa SiC |
| Bophara | 100 – 1500mm (e chitja) kapa e khutlonnetsepa |
| Botenya | 5 – 20 mm |
| Bophara ba Lesoba | 0.3 – 1.5 mm |
| Paterone ea Lesoba | E ikgethileng (e kgutlotharo, e sekwere, e nang le radial) |
| Bophara | ≤10 μm holim'a sebaka se felletseng |
| Bokakang ba Bokaholimo | Ra ≤0.6 μm (lehlakore la khase) |
| Karolelano ea Sebaka se Bulehileng | 5–15% |
Likopo:
Lipoleiti tsa shaoara tsa PECVD
Li-injector tsa khase tsa ALD
Lipoleiti tsa kabo ea khase ea kamore ea ho qoelisa
Likarolo tsa seakere sa MOCVD
Tlhahiso:
Karolo ea alumina e kobehileng e bataletse → Ho phunya ha CNC ka lisebelisoa tse koahetsoeng ka taemane (mamello ea boemo ba lesoba ± 0.02 mm) → ho tlosa lithōle → ho hloekisa ka ultrasound → Sephutheloana sa Sehlopha sa 100.
Taolo ea Boleng:
Poleiti ka 'ngoe e hlahlojoa ka 100% bakeng sa boholo ba masoba (tsamaiso ea pono), ho ba bataletse (laser interferometer), le ho tšoana ha phallo ea khase ('mapa oa khatello). Ha ho na mapetso a manyenyane tlas'a microscope ea makhetlo a 20.
Melemo ho feta Lipoleiti tsa Tšepe:
Ha ho na tšilafalo ea tšepe lifiliming tse tšesaane
Moloko o ka tlase oa likaroloana (ha ho na matheba a ts'enyeho)
E mamella li-plasma tse hloekisang ka matla (CF₄, NF₃)
Likarolo tse Ikhethileng:
Likanale tsa khase tse ka morao, masoba a thibang, litiiso tsa mathoko, le mefuta e fapaneng ea thepa (SiC bakeng sa ho tsamaisa mocheso o phahameng, sekoahelo sa Y₂O₃ bakeng sa ho hanyetsa plasma).
Re fana ka netefatso ea CAD le ketsiso ea phallo pele ho tlhahiso.
