Lesale la Ceramic la Alumina le Hloekileng ka ho Fetisisa bakeng sa Likamore tsa Ts'ebetso ea CVD / PVD
Lesale la letsopa la St.Cera le etselitsoe ka ho khetheha ho sebelisoa likamoreng tsa ts'ebetso tsa CVD (Chemical Vapor Deposition) le PVD (Physical Vapor Deposition). Lesale lena le entsoe ka 99.8% alumina e hloekileng haholo (Al₂O₃), lesale lena le sebetsa e le karolo ea kamore, lesale la ho tsepamisa mohopolo, kapa karolo ea kit ea ts'ebetso ho thibela plasma le ho sireletsa mabota a kamore hore a se ke a khoholeha. Thepa ena e fana ka khanyetso e ntle ea plasma, matla a phahameng a dielectric (15×10⁶ V/m), le botsitso ba mocheso ho fihlela ho 1600°C, ho netefatsa bophelo bo bolelele ba ts'ebeletso libakeng tse matla tsa plasma tse thehiloeng ho fluorine. Mamello e nepahetseng ea litekanyo (± 0.05 mm ho ID/OD) le ho ba sephara (≤10 μm) li nolofalletsa ho beha moeli oa wafer ka mokhoa o tsitsitseng, ho ntlafatsa ho ts'oana ha deposition le ho fokotsa tlhahiso ea likaroloana.
Litlhaloso (li ipapisitse le 99.8% Al₂O₃):
| Thepa | Boleng |
| Thepa | 99.8% Alumina (Lenaka la tlou) |
| Botenya | 3.93 g/cm³ |
| Ho Monya Metsi | 0% |
| Matla a ho Tenyetseha | 361 MPa |
| Ho Tiea ha ho Robeha | 3–4 MPa·m¹/² |
| Boima ba Vickers | 16 GPa |
| Modulus ea Young | 380 GPa |
| Ho khanna ha mocheso | 32 W/m·k |
| Katoloso ea Thermal (25–1000°C) | 7.2×10⁻⁶/℃ |
| Matla a Dielectric | 15×10⁶ V/m |
| Khanyetso e Ikhethang | >10¹⁴ Ω·cm |
| Mocheso o Moholo oa ho Sebetsa | 1600°C |
Likopo:
- · Masale a shebaneng le kamore ea CVD le masale a mathōko
- · Masale a thebe ea kamore ea PVD le masale a clamp
- · Li-liner tsa kamore ea ho fata le masale a sekoahelo
- · Masale a ho koalloa ha plasma litsamaisong tsa etch tsa dielectric
Mokhoa oa Tlhahiso:
Ho tobetsa ka tsela e sa fetoheng → ho tjhesa ka botala → ho sila ka mocheso wa 1600°C → ho sila ka CNC ID/OD → ho tjhesa ka hodima metsi → ho hlwekisa ka ultrasonic → tlhahlobo ya 100% CMM. Qetello ya hodima metsi e boreledi haholo (Ra ≤0.4 μm) e fokotsa ho kgomarela ha dikarolwana.
Taolo ea Boleng:
- · Tlhahlobo ea boholo ba 100% (ID, OD, botenya, ho batalla)
- · Tlhahlobo ea ho penta ka dae bakeng sa mapetso a manyenyane a holim'a metsi
- · Teko ea matla a dielektri ka ASTM D149
- · Ha ho na ho fifala ha 'mala kapa masoba a bonahalang tlas'a microscope ea 20×
Melemo ho feta masale a tšepe kapa a Quartz:
- · Nako e telele ea bophelo ka 5–10× ho feta masale a aluminium ka har'a plasma ea fluorine
- · Ha ho na tšilafalo ea tšepe lifiliming tse tšesaane
- · Ho hanyetsa plasma ho hoholo ho feta quartz (ha ho na mekoti ea khoholeho ea mobu)
- · E boloka mocheso oa motlakase >10¹⁴ Ω·cm esita le ka mor'a tšebeliso ea nako e telele
Thepa e 'Ngoe — Silicon Nitride (Si₃N₄):
Bakeng sa ditshebediso tse hlokang ho tiea ho hoholo ha ho robeha (6.2 MPa·m¹/²) le ho hanyetsa ho betere ha mocheso (koefficient ya katoloso 3.2×10⁻⁶/℃), masale a Si₃N₄ a a fumaneha. Leha ho le jwalo, alumina e theko e tlase haholo bakeng sa ditshebediso tse ngata tsa CVD/PVD. Ka kopo hlalosa kgetho ya thepa ha o odara.
Ho iketsetsa:
- · Masoba a phunyeletsang, liprofaele tse nang le litepisi, kapa li-counterbore bakeng sa ho li kenya
- · Bokaholimo bo koahetsoeng ke Y₂O₃ bakeng sa khanyetso e matla ea plasma (ha ho hlokahale)
- · Ho ngoloa ka laser ha nomoro ea karolo / khoutu ea lotho
Hlokomela:Lintlha tse ka holimo li latela ka tieo tafole ea thepa ea Al₂O₃ e fanoeng. Bakeng sa mehele ea Si₃N₄, sheba leqephe la data la Si₃N₄ le arohaneng le fanoeng.
