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Likarolo tsa Ceramic tsa Alumina tse Hloahloa tse Nepahetseng ka ho Fetisisa
Li entsoe ka ho hatelloa ka mokhoa o batang oa isostatic le ho siloa tlas'a mocheso o phahameng, ebe li etsoa ka mochini o nepahetseng le ho bentšitsoe, likarolo tse ling tsa letsopa li ka fihlela litlhoko life kapa life tse thata tsa lisebelisoa tsa semiconductor ka likarolo tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ea mocheso le ho kenya mocheso. Li-ceramic li ka sebetsa mefuteng e mengata ea lisebelisoa tsa tlhahiso ea semiconductor tse nang le boemo ba mocheso o phahameng, khase ea vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Lisebelisoa tsa Semiconductor tse Ikhethileng tsa ST.CERA
Li entsoe ka ho hatelloa ka mokhoa o batang oa isostatic le ho siloa tlas'a mocheso o phahameng, ebe li etsoa ka mochini o nepahetseng le ho bentšitsoe, likarolo tse ling tsa letsopa li ka fihlela litlhoko life kapa life tse thata tsa lisebelisoa tsa semiconductor ka likarolo tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ea mocheso le ho kenya mocheso. Li-ceramic li ka sebetsa mefuteng e mengata ea lisebelisoa tsa tlhahiso ea semiconductor tse nang le boemo ba mocheso o phahameng, khase ea vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Silicon Carbide (SiC) Ceramic End Effector – Ho Tiea ho Hoholo bakeng sa ho Sebetsana le Wafer ka Mocheso o Phahameng
Sephetho sa ceramic sa St.Cera's SiC se entsoe ka silicon carbide e hloekileng haholo (kahare ho SiC 99.72%, Si e lokolohileng 0.05%) ho sebelisoa thepa ea sehlopha sa S1111. E fana ka thepa e ikhethang ea mechini: matla a ho flexural 449 MPa (e lekantsoe), modulus ea elastic 457 GPa (e lekantsoe), le thatafalo ea Vickers 25–28 GPa (e tloaelehileng). Botenya bo tlase (3.10–3.15 g/cm³, e tloaelehileng) bo fana ka ho tiea ho hoholo ho khethehileng, ho loketseng liroboto tsa phetisetso ea wafer tse lebelo le phahameng. Ka conductivity ea mocheso ea 120–150 W/m·K (e tloaelehileng) le coefficient ea katoloso ea mocheso ea 4.0–4.5×10⁻⁶/℃ (e tloaelehileng), sephetho sena se felisa mocheso ka katleho 'me se boloka botsitso ba litekanyo nakong ea ts'ebetso ea mocheso o phahameng (ho fihlela ho 1600–1700°C, ha ho mojaro). 'Mala o motšo/o moputsoa le ho monngoa ha metsi ho lefela li netefatsa hore kamore e hloekile e lumellana.
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Setlolo sa Vacuum se Thehiloeng ho Silicon Carbide (SiC) bakeng sa Tikoloho tse Mocheso o Phahameng le Plasma
Sekotwana sa letsopa se thehiloeng ho St.Cera's SiC se entsoe ka silicon carbide e hloekileng haholo (batch S1111, SiC 99.72%, Si e lokolohileng 0.05%). E fana ka matla a ho kokobela a lekantsoeng a 449 MPa, ho tiea ha ho robeha ha 3.12 MPa·m¹/², le modulus ea elastic ea 457 GPa. Ho tsamaisa mocheso ho tloaelehileng ha thepa (120–150 W/m·K) le katoloso e tlase ea mocheso (4.0–4.5×10⁻⁶/℃) ho nolofalletsa ho potlaka ha mocheso le ho warpage e fokolang ea wafer nakong ea potoloho ea mocheso. Sekotwana se ka hlophisoa e le sekotwana sa vacuum se nang le masoba (phallo ea khase e tšoanang) kapa sekotwana se tloaelehileng se nang le moalo. Ka mocheso o phahameng ka ho fetisisa oa tšebeliso oa 1600–1700°C (ha ho mojaro) le ho hanyetsa khoholeho ea plasma ka mokhoa o ikhethang, sekotwana sena se loketse ho sebetsa ka sekotwana sa wafer mochesong o phahameng (ho annealing, RTP) le likamore tsa etch tse mabifi moo li-chuck tsa alumina li senyehang.
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Lisebelisoa tsa Semiconductor Likarolo tsa Ceramic Spare Carriers
Li entsoe ka ho hatelloa ka mokhoa o batang oa isostatic le ho siloa tlas'a mocheso o phahameng, ebe li etsoa ka mochini o nepahetseng le ho bentšitsoe, likarolo tse ling tsa letsopa li ka fihlela litlhoko life kapa life tse thata tsa lisebelisoa tsa semiconductor ka likarolo tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ea mocheso le ho kenya mocheso. Li-ceramic li ka sebetsa mefuteng e mengata ea lisebelisoa tsa tlhahiso ea semiconductor tse nang le boemo ba mocheso o phahameng, khase ea vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Lesale la ho Sila la Alumina Ceramic le Tšepe le Tšepe bakeng sa Likopo tsa ho Lapa ka Matla a Phahameng
Lesale la ho sila la alumina le thehiloeng tšepeng la St.Cera le kopanya lera la ho roala la alumina le hloekileng haholo (99.8% Al₂O₃) le nang le tšehetso ea tšepe e entsoeng ka mochini o nepahetseng (hangata aluminium kapa tšepe e sa ruseng). Moralo ona o kopantsoeng o fana ka khanyetso e ikhethang ea ho roala le ho se sebetse hantle ha ceramic holim'a metsi a silang, ha motheo oa tšepe o eketsa matla a mechini, ho kenya habonolo, le ho hanyetsa ho robeha ha brittle. Lera la alumina le fana ka matla a ho kobeha a 361 MPa, ho thatafala ha Vickers ha 16 GPa, le botsitso ba mocheso ho fihlela ho 800°C. Motheo oa tšepe o etselitsoe ka masoba a ho kenya, ho fumana li-pin, kapa thepa ea makenete bakeng sa ho kopanngoa le mechini ea ho lapa, li-grinder tsa polanete le lisebelisoa tsa CMP.
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Likarolo tsa Ceramic bakeng sa Lisebelisoa tsa Seteishene sa Probe sa Semiconductor
Li entsoe ka ho hatelloa ka mokhoa o batang oa isostatic le ho siloa tlas'a mocheso o phahameng, ebe li etsoa ka mochini o nepahetseng le ho bentšitsoe, likarolo tse ling tsa letsopa li ka fihlela litlhoko life kapa life tse thata tsa lisebelisoa tsa semiconductor ka likarolo tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ea mocheso le ho kenya mocheso. Li-ceramic li ka sebetsa mefuteng e mengata ea lisebelisoa tsa tlhahiso ea semiconductor tse nang le boemo ba mocheso o phahameng, khase ea vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Ts'ebetso e Ikhethileng ea Al2O3 Ceramic Wafer Chuck
Li entsoe ka ho hatelloa ka mokhoa o batang oa isostatic le ho siloa tlas'a mocheso o phahameng, ebe li etsoa ka mochini o nepahetseng le ho bentšitsoe, likarolo tse ling tsa letsopa li ka fihlela litlhoko life kapa life tse thata tsa lisebelisoa tsa semiconductor ka likarolo tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ea mocheso le ho kenya mocheso. Li-ceramic li ka sebetsa mefuteng e mengata ea lisebelisoa tsa tlhahiso ea semiconductor tse nang le boemo ba mocheso o phahameng, khase ea vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Lisebelisoa tsa Semiconductor tse Ikhethileng tsa ST.CERA
Li entsoe ka ho hatelloa ka mokhoa o batang oa isostatic le ho siloa tlas'a mocheso o phahameng, ebe li etsoa ka mochini o nepahetseng le ho bentšitsoe, likarolo tse ling tsa letsopa li ka fihlela litlhoko life kapa life tse thata tsa lisebelisoa tsa semiconductor ka likarolo tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ea mocheso le ho kenya mocheso. Li-ceramic li ka sebetsa mefuteng e mengata ea lisebelisoa tsa tlhahiso ea semiconductor tse nang le boemo ba mocheso o phahameng, khase ea vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Sekoti sa Alumina sa Vacuum sa lisenthimithara tse 12 bakeng sa Ts'ebetso ea Wafer ea 300mm
Sekotwana sa vacuum sa St.Cera sa lisenthimithara tse 12 se entsoe ka nepo ho tsoa ho alumina ea 99.8% e hloekileng haholo (Al₂O₃) bakeng sa ho sebetsana le wafer ea 300mm. Sekotwana sena se na le bokaholimo bo kobehileng hantle (bophara ba groove 0.5–1.0 mm, bophahamo ba 2–3 mm) ho netefatsa kabo e lekanang ea vacuum ho pholletsa le bophara bohle ba 300mm. Bophara bo bolokoa ka har'a 5 μm, bo nolofalletsang ho tsitsisa wafer e se nang ho kobeha nakong ea ho seha, ho sila ka morao le ho hlahlojoa. Matla a phahameng a ho kobeha (361 MPa) le ho thatafala (16 GPa) tsa thepa li tiisa botsitso ba nako e telele esita le tlas'a potoloho ea vacuum e pheta-phetoang.
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Alumina Ceramic End Effector e nang le Likanale tse Kopaneng tsa Vacuum
Sesebelisoa sa ho qetela sa ho kenya li-alumina sa St.Cera se kopanya likanale tsa vacuum tse entsoeng ka mokhoa o nepahetseng le masoba a ho hula ka kotloloho 'meleng oa alumina oa 99.8%. Moralo ona o tlosa li-pads tsa vacuum tsa kantle, o nolofalletsa ho nka li-wafer ka kotloloho ka matla a ts'oanang a ho tšoara. Matla a phahameng a ho kobeha ha thepa (361 MPa) le ho thatafala (16 GPa) li netefatsa botsitso ba nako e telele tlas'a lipotoloho tse pheta-phetoang tsa vacuum. Ho ba bataletse ho pholletsa le sebaka sa pad ho bolokoa ka har'a 10 μm, ho thibela khatello ea wafer le ho robeha. Likou tsa vacuum li fumaneha ka morao ho flange bakeng sa ho hokela habonolo le matsoho a roboto ea OEM.
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Likarolo tsa Ceramic tsa Alumina tse Sireletsehileng tsa ESD bakeng sa ho Tšoara Wafer e sa Fetoheng
Likarolo tsa letsopa tse bolokehileng tsa alumina tsa St.Cera's ESD (electrostatic discharge) li entsoe ka 99.8% ea Al₂O₃ e hloekileng haholo ka resistivity e etselitsoeng bokaholimo ba 10⁶–10⁹ Ω/sq, e fihlellehang ka mokhoa oa doping kapa coating. Likarolo tsena li qhala ka katleho tjhaja e sa fetoheng, li thibela tšenyo ea electrostatic ho li-wafer le lisebelisoa tse bonolo tsa semiconductor. Thepa ea motheo e boloka matla a eona a phahameng a ho flexural (361 MPa), ho thatafala (16 GPa), le matla a dielectric (15×10⁶ V/m). Likarolo tsa letsopa tse bolokehileng tsa ESD li kenyelletsa li-end effectors, li-lift pin, li-guide rails, le lisebelisoa tse ikhethileng bakeng sa automation ea FAB.
