Silicon Carbide (SiC) Ceramic End Effector – Ho Tiea ho Hoholo bakeng sa ho Sebetsana le Wafer ka Mocheso o Phahameng
Sephetho sa ceramic sa St.Cera's SiC se entsoe ka silicon carbide e hloekileng haholo (kahare ho SiC 99.72%, Si e lokolohileng 0.05%) ho sebelisoa thepa ea sehlopha sa S1111. E fana ka thepa e ikhethang ea mechini: matla a ho flexural 449 MPa (e lekantsoe), modulus ea elastic 457 GPa (e lekantsoe), le thatafalo ea Vickers 25–28 GPa (e tloaelehileng). Botenya bo tlase (3.10–3.15 g/cm³, e tloaelehileng) bo fana ka ho tiea ho hoholo ho khethehileng, ho loketseng liroboto tsa phetisetso ea wafer tse lebelo le phahameng. Ka conductivity ea mocheso ea 120–150 W/m·K (e tloaelehileng) le coefficient ea katoloso ea mocheso ea 4.0–4.5×10⁻⁶/℃ (e tloaelehileng), sephetho sena se felisa mocheso ka katleho 'me se boloka botsitso ba litekanyo nakong ea ts'ebetso ea mocheso o phahameng (ho fihlela ho 1600–1700°C, ha ho mojaro). 'Mala o motšo/o moputsoa le ho monngoa ha metsi ho lefela li netefatsa hore kamore e hloekile e lumellana.
Litlhaloso(ho latela tlaleho ea teko ea SiC S1111 e fanoeng le boleng bo tloaelehileng):
| Thepa | Boleng |
| Thepa | SiC (99.72% SiC, 0.05% Si ea Mahala) |
| 'Mala | Botsho/Bohlooho |
| Botenya | 3.10–3.15 g/cm³ |
| Ho Monya Metsi | 0% |
| Matla a ho Tenyetseha | 449 MPa (karolelano) |
| Ho Tiea ha ho Robeha | 3.12 MPa·m¹/² (karolelano) |
| Modulus e tenyetsehang | 457 GPa |
| Boima ba Vickers | 25–28 GPa |
| Ho Tsamaisa Mocheso (25°C) | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5×10⁻⁶/℃ |
| Mocheso o Moholo oa Tšebeliso (ha ho mojaro) | 1600–1700°C |
Likopo:
● Ho sebetsana le wafer ka mocheso o phahameng (kamora ho kenngoa ha metsi, RTP, epitaxy)
● Likamore tsa ho phunya plasma tse hlokang ho hanyetsa khoholeho e phahameng
● Liroboto tsa phetisetso e potlakileng (tse bobebe, tse thata haholo)
Tlhahiso:
Ho sila phofo ea SiC → Ho sila ka nepo ha CNC ha profaele ea letsoho le likarolo tsa ho e kenya → ho kopanya bokaholimo → ho hloekisa ka ultrasound. Tlhahlobo ea 100% le teko ea ho lutla ha helium bakeng sa lits'ebetso tsa vacuum.
Taolo ea Boleng:
● Tlhahlobo ea CMM ea bolelele, bophara le ho se teteane
● Teko ea matla a ho tenyetseha ka sehlopha (ka tekanyetso ea tlaleho ea teko)
● Tlhahlobo ea pono tlas'a microscope bakeng sa liphoso tsa bokaholimo
Melemo ho feta Alumina kapa Tšepe:
● 2 × modulus e phahameng ea elastic (457 khahlanong le ~380 GPa bakeng sa alumina) – ho kheloha ho fokolang
● 3 × conductivity e phahameng ea mocheso - ho qhalana ha mocheso ka potlako
● E mamella >1600°C ha e bapisoa le 800°C ea alumina moeeng
● Boima bo tlase ho feta tšepe - phokotso ea boima ba 40%
Ho iketsetsa:
Bolelele ba 150–450 mm, dibopeho tsa ntlha (setshwaro sa bohale, Bernoulli, se bataletseng), dipaterone tsa flange tse kenngwang ka setshwantsho sa OEM.
*Dintlha tsohle tsa mechini tse kaholimo di tswa tlalehong ya teko e fanweng (batch S1111). Boleng ba mocheso le boima bo tlwaelehile bakeng sa sehlopha sena sa SiC; ka kopo ikopanye le rona bakeng sa setifikeiti se ikgethang.*
