Likarolo tsa Ceramic tsa Alumina tse Sireletsehileng tsa ESD bakeng sa ho Tšoara Wafer e sa Fetoheng
Likarolo tsa letsopa tse bolokehileng tsa alumina tsa St.Cera's ESD (electrostatic discharge) li entsoe ka 99.8% ea Al₂O₃ e hloekileng haholo ka resistivity e etselitsoeng bokaholimo ba 10⁶–10⁹ Ω/sq, e fihlellehang ka mokhoa oa doping kapa coating. Likarolo tsena li qhala ka katleho tjhaja e sa fetoheng, li thibela tšenyo ea electrostatic ho li-wafer le lisebelisoa tse bonolo tsa semiconductor. Thepa ea motheo e boloka matla a eona a phahameng a ho flexural (361 MPa), ho thatafala (16 GPa), le matla a dielectric (15×10⁶ V/m). Likarolo tsa letsopa tse bolokehileng tsa ESD li kenyelletsa li-end effectors, li-lift pin, li-guide rails, le lisebelisoa tse ikhethileng bakeng sa automation ea FAB.
Litlhaloso(ho ipapisitsoe le 99.8% Al₂O₃ ka kalafo ea ESD):
| Thepa | Boleng |
| Thepa ea Motheo | 99.8% Alumina |
| Ho Hanela Bokaholimo (ESD) | 10⁶–10⁹Ω/sekwere |
| Botenya | 3.93 g/cm³ |
| Matla a ho Tenyetseha | 361 MPa |
| Boima ba Vickers | 16 GPa |
| Modulus ea Young | 380 GPa |
| Katoloso ea Thermal (25-1000°C) | 7.2×10⁻⁶/℃ |
| Mocheso o Phahameng oa Ts'ebetso | 800°C |
| Matla a Dielectric (ka bongata) | 15×10⁶ V/m |
Hlokomela: Ho hanyetsa bokaholimo ba ESD ha ho fanoe litafoleng tsa thepa ea thepa e fanoeng. Mefuta e ka holimo ke maemo a indasteri bakeng sa li-ceramic tse senyang. Ka kopo ikopanye le rona bakeng sa litlaleho tsa liteko.
Likopo:
● Lisebelisoa tsa ho qetela tse sireletsehileng tsa ESD bakeng sa phetisetso ea wafer
● Lipini tsa ho theola fatše le lisebelisoa tsa ESD lisebelisoa tsa FAB
● Leka li-socket bakeng sa lisebelisoa tse sa fetoheng
● Lisebelisoa tsa ho hloekisa moo taolo e sa fetoheng e leng ea bohlokoa
Tlhahiso le Boleng:
Tshebetso e tloaelehileng ea alumina + kalafo ea bokaholimo ba ESD → ho hanyetsa bokaholimo ho lekanngoa ho latela ANSI/ESD STM11.11. Karolo ka 'ngoe e lekoa ka 100% ka electrode ea lesale le kopantseng.
Melemo:
● E thibela tahlehelo ea chai e amanang le ESD
● E boloka matla a mechine a letsopa le ho hanyetsa lik'hemik'hale
● Ha ho na tlhahiso ea likaroloana tse tsoang ho tjhajoa ho sa fetoheng
