Teflon Coated Ceramic End Effector – Sebaka se sa Khomareleng bakeng sa ho Sebetsana le Wafer e Bonolo
Sephetho sa ceramic se koahetsoeng ka Teflon (PTFE) sa St.Cera se kopanya substrate ea alumina e matla haholo le seaparo sa PTFE se ts'oanang, se nang le khohlano e tlase (botenya ba 15-30 μm). Seaparo sena se fana ka coefficient e tlase haholo ea khohlano (≤0.1), khanyetso e ntle ea lik'hemik'hale, le thepa e sa khomareleng, e thibelang ho khomarela ha wafer le ho felisa tšilafalo ea mokokotlo. Substrate ea ceramic e ka tlase (99.8% Al₂O₃) e fana ka matla a phahameng a ho thekesela (361–1000 MPa), khanyetso ea ho tsofala, le botsitso ba mocheso ho fihlela ho 260°C (moeli oa ho roala). Sephetho sena se loketse ho sebetsana le li-wafer tse bonolo, tse tšesaane, kapa tse khomarelang (mohlala, kamora ho roala ka photoresist kapa lits'ebetso tsa lik'hemik'hale).
Litlhaloso (ho latela substrate ea 99.8% Al₂O₃ e nang le sekoahelo sa PTFE):
| Thepa | Boleng |
| Lisebelisoa tsa Substrate | 99.8% Alumina (Lenaka la tlou) |
| Lisebelisoa tsa ho roala | PTFE (Teflon) |
| Botenya ba ho roala | 15–30 μm |
| Koefficient ea Khohlano (E koahetsoeng) | ≤0.1 |
| Matla a ho Flexural a Substrate (Al₂O₃) | 361 MPa |
| Bothata ba Substrate (Al₂O₃) | 16 GPa |
| Botenya ba Substrate | 3.93 g/cm³ |
| Mocheso o Phahameng oa Ts'ebetso (moeli oa ho roala) | 260°C |
| Bokgoni ba Bokaholimo (pele ho pente) | Ra ≤0.4 μm |
| Matla a Dielectric (substrate) | 15×10⁶ V/m |
Hlokomela: Seaparo sa PTFE se fokotsa mocheso o phahameng ho 260°C; bakeng sa lits'ebetso tsa mocheso o phahameng, nahana ka liaparo tse sa koaheloang tsa ceramic kapa tse ling.
Likopo:
- · Ho sebetsana le li-wafer ka mor'a ho penta ka photoresist (libaka tse khomarelang)
- · Phetisetso ea li-wafer tse tšesaane kapa tse fokolang (e thibela ho khomarela)
- · Tlhahlobo ea semiconductor le lisebelisoa tsa metrology
- · Boiketsetso ba kamore ea ho hlwekisa moo tšilafalo ea likaroloana e lokelang ho fokotsoa
Mokhoa oa Tlhahiso:
Sekontiri se sintered le mobu o nepahetseng → ho omisa bokaholimo (plasma etch kapa grit blast) → PTFE spray coating → ho futhumatsa mocheso ho 380°C → tlhahlobo ea ho qetela. Motlakase o mong le o mong oa qetello o hlahlojoa bakeng sa botenya ba ho roala (eddy current), ho khomarela (teko ea cross-cut ASTM D3359), le coefficient ea khohlano.
Taolo ea Boleng:
Tlhahlobo ea pono ea 100% bakeng sa likoti kapa lipululana; ho tšoana ha botenya ba ho roala ka hare ho ±5 μm; ha ho na karohano kamora teko ea ho kobeha ea 90° ho setlankane sa lipaki. Tlhahlobo ea litekanyo ho latela mamello ea OEM (bolelele ± 0.05 mm, ho batalatsa ≤0.1 mm).
Melemo ho feta Liaparo tse sa koaheloang kapa tse ling:
- · Bokaholimo bo sa khomareleng bo thibela ho khomarela le ho robeha ha wafer
- · Koefficient e tlase ka ho fetisisa ea khohlano har'a liphahlo tsa letsopa
- · Ho hanyetsa lik'hemik'hale hantle haholo (li-acid, li-base, li-solvents)
- · E fokotsa tlhahiso ea likaroloana ka ho thibela phetiso ea thepa
Meeli (mantsoe mabapi le ho kheloha ha thepa):
Sekoahelo sa PTFE ha se nkiloe litafoleng tsa thepa ea thepa tse fanoeng (Al₂O₃, ZrO₂, Si₃N₄, BeO). Thepa ea substrate e latela ka tieo leqephe la data le fanoeng (99.8% Al₂O₃). Thepa ea sekoahelo e ipapisitse le litlhaloso tsa PTFE tsa maemo a indasteri, kaha ha ho na data ea sekoahelo e fanoeng. Bakeng sa lits'ebetso tse fetang 260°C, ho khothaletsoa sesebelisoa sa ho qetela sa ceramic se sa koaheloang.*
Ho iketsetsa:
E fumaneha ka bolelele ba 150–1500 mm, dibopeho tsa ntlha (setshwaro sa bohale, Bernoulli, se bataletseng), dipaterone tsa flange tse kenngwang ka setshwantsho sa OEM. Ho kwahela ka karolo (dibaka tsa ho kopana feela) kapa ho kwahela ka botlalo ke boikgethelo.
Kopa sampole bakeng sa teko ea ho khomarela le ho khohlano.
