Alumina-Thehiloe ho Standard Vacuum Chuck – Ho Tiea ho Hoholo bakeng sa ho Sebetsa ka ho Nepahetseng
Sekotwana sena sa vacuum se entsoeng ka alumina se entsoe ka 99.8% Al₂O₃, se fana ka bokaholimo bo boreleli bo se nang masoba bo nang le dipaterone tsa vacuum groove tse ikgethileng. Se fana ka ho tiea ho ikhethang (modulus ea Young ea 380 GPa) le ho ba bataletse (≤3 μm), e leng se etsang hore e be ntle bakeng sa ho sila, ho kopanya le ho arola ka nepo li-wafer tsa semiconductor le likarolo tsa optical. Ho tsamaisa mocheso ho phahameng ha thepa (32 W/m·k) ho netefatsa ho tšoana ha mocheso nakong ea ts'ebetso.
Litlhaloso(ho ipapisitsoe le 99.8% Al₂O₃):
| Thepa | Boleng |
| Thepa | 99.8% Alumina (Lenaka la tlou) |
| Botenya | 3.93 g/cm³ |
| Matla a ho Tenyetseha | 361 MPa |
| Boima ba Vickers | 16 GPa |
| Modulus ea Young | 380 GPa |
| Ho khanna ha mocheso | 32 W/m·k |
| Bophara | ≤3 μm (ho feta 200mm) |
| Bokgopo ba bokaholimo (lehlakore la chuck) | Ra ≤0.4 μm |
| Mocheso o Phahameng oa Ts'ebetso | 800°C |
Likopo:
- · Ho sila ka morao ha wafer (e mahoashe ebile e le tšesaane)
- · Ho seha ka nepo thepa e robehang habonolo
- · Ho kopanya li-substrate tsa letsopa
- · Ho bentša lense ea mahlo
Tlhahiso:
Ho kopanya mahlakore ka bobeli ka nepo → ho thiba taemane (ha ho hlokahale) → ho potoloha mathōko → ho hloekisa ka ultrasound → tlhahlobo ea ho batalla ka 100% ka laser interferometer.
Amelemo:
- · Tšehetso e tiileng e fokotsa ho kheloha tlas'a mojaro
- · Ha ho tlhahiso ea likaroloana ho tsoa sebopehong se nang le masoba
- · Ho bonolo ho e hlwekisa (e lumellana le ho hlakola ka solvent)
- · Meroho e ka fetoloang ka mokhoa o ikhethileng (e shebaneng, e nang le mahlaseli a letsatsi, le e entsoeng ka mokhoa o ikhethileng)
Boholo bo fumanehang:
Selikalikoe: 100mm, 150mm, 200mm, 300mm; sekwere/khutlonnetsepa ha ho kopuoa.
Re boetse re fana ka mefuta e thehiloeng tšepeng bakeng sa matla a phahameng a mechini.
