Phello ea Phello ea Alumina Ceramic e Hloekileng ka ho Fetisisa bakeng sa Liroboto tse Tšoarang ka Wafer
Sesebelisoa sa ho qetela sa alumina ceramic sa St.Cera se entsoe ka nepo ho tloha ho 99.8% Al₂O₃ e hloekileng haholo ho sebelisoa lisebelisoa tse tsoetseng pele tsa ho sila tsa CNC tse 5-axis. Bokhoni ba rona ba tlhahiso bo kenyelletsa mechini ea ho sila ka nepo le litsi tsa ho sila tsa CNC, tse nolofalletsang li-geometri tse rarahaneng ka nepo e phahameng. Sesebelisoa sa ho qetela se na le profil e tšesaane (e tšesaane joalo ka 1.5 mm) e nang le lehlakore le ka pele le lesesaane bakeng sa ho kenngoa ha wafer e boreleli. Thepa e fana ka ho tiea ho hoholo (modulus ea Young ea 380 GPa), ho hanyetsa ho tsofala ho hoholo, le botsitso ba mocheso ho fihlela ho 800°C. Yuniti ka 'ngoe e siloa ka nepo ho fihlela ho batalla ha 0.003mm, ho tšoana ha 0.002mm, le qetello ea bokaholimo ba Ra0.1, ho netefatsa ho kopana ho tsitsitseng ha wafer le ts'ebetso e se nang likaroloana libakeng tsa semiconductor FAB. E fumaneha ka bolelele ho tloha ho 150 mm ho isa ho 450 mm, ka li-geometri tsa ntlha tse ikhethileng (setšoantšo sa bohale, Bernoulli, se bataletseng) le li-flange tse hokeloang ho lekana liroboto tsa OEM. Dikgetho tsa ho qeta bokaholimo di kenyeletsa ho kwahela ka ho kobeha, ho benya, kapa ho kwahela ka ESD (10⁶–10⁹ Ω/sq).
Litlhaloso (li ipapisitse le 99.8% Al₂O₃& Bokgoni ba tlhahiso ba St.Cera):
| Thepa | Boleng |
| Thepa | 99.8% Alumina (Lenaka la tlou) |
| Botenya | 3.93 g/cm³ |
| Matla a ho Tenyetseha | 361 MPa |
| Boima ba Vickers | 16 GPa |
| Modulus ea Young | 380 GPa |
| Bophara | 0.003mm |
| Ho tšoana ha lintho | 0.002mm |
| Qetello ea Bokaholimo | Ra0.1 (e kobehileng/e bentšitsoeng) |
| Mocheso o Phahameng oa Ts'ebetso | 800°C |
| Bolelele ba Nako | 150–450 mm |
Likopo:
- · Phetisetso ea wafer ka har'a liroboto tse se nang letho le tse nang le moea o pholileng
- · Li-effector tsa FAB tsa othomathike bakeng sa li-wafer tsa 200mm/300mm
- · Ho sebetsana le wafer e tšesaane (ka khetho ea ESD)
Bokgoni ba Tlhahiso:
Mechini ea rona ea ho sila ka nepo le litsi tsa mechini ea CNC li nolofalletsa tlhahiso ea likarolo tse rarahaneng tsa letsopa tse nang le:
- · Bolelele bo boholo ba ho sebetsa ka mechine: 1500mm
- · Bophara bo boholo ba kantle: 600mm
- · Bophara bo bonyane ba ka hare: 0.2mm
- · Botenya bo boholo: 100mm
Taolo ea Boleng:
Ho otloloha 0.005mm, ho otloloha 0.005mm, ho chitja 0.002mm, ho bapallana 0.002mm, ho tsepamisa maikutlo 0.01mm ho netefalitsoe ke CMM. Yuniti ka 'ngoe e hloekisoa ka ultrasonic le kamore e hloekileng ea Sehlopha sa 100 e pakiloe.
