Alumina Vacuum Chuck bakeng sa ho Seha le ho Sila ka nepo
Sekotwana sa vacuum sa alumina sa St.Cera se entsoe ka 99.8% Al₂O₃ e hloekileng haholo ka li-groove tsa vacuum tse entsoeng ka nepo. Bokhoni ba rona ba ho sila ka nepo bo fihlella ho batalla ha 0.003mm le ho tšoana ha 0.002mm, ho netefatsa ho tiea ha wafer e se nang ho kobeha nakong ea ho seha, ho sila ka morao le tlhahlobo. Thepa e fana ka matla a phahameng a ho kobeha (361 MPa), ho thatafala (16 GPa), le botsitso ba mocheso ho fihlela ho 800°C. E fumaneha ka libopeho tse chitja ho fihlela ho 600mm bophara ba kantle (OD) le libopeho tse khutlonnetsepa ho fihlela bolelele ba 1500mm. Li-groove tsa vacuum li entsoe ka mokhoa o ikhethileng (lipaterone tse kobehileng, tsa radial, kapa tsa grid) ho latela litlhoko tse itseng tsa ts'ebetso. Sekotwana se seng le se seng se hlahlojoa ka laser interferometer 'me se fanoa ka tlaleho ea netefatso ea ho batalla.
Litlhaloso (li ipapisitse le 99.8% Al₂O₃& Bokgoni ba tlhahiso ba St.Cera):
| Thepa | Boleng |
| Thepa | 99.8% Alumina (Lenaka la tlou) |
| Botenya | 3.93 g/cm³ |
| Matla a ho Tenyetseha | 361 MPa |
| Boima ba Vickers | 16 GPa |
| Bophara ba Kantle (max) | 600mm |
| Botenya (boholo) | 100mm |
| Bolelele (boholo) | 1500mm |
| Bophara | 0.003mm |
| Ho tšoana ha lintho | 0.002mm |
| Qetello ea Bokaholimo | Ra0.1 |
| Mocheso o Phahameng oa Ts'ebetso | 800°C |
Likopo:
- · Ho seha le ho ngola ka wafer (200mm/300mm le ho feta)
- · Ho sila li-wafer tse tšesaane ka morao
- · Tlhahlobo le ho hlahloba mahlo
- · Tlhokomelo e kholo ea substrate
Tlhahiso e nepahetseng ea Tlhahiso:
- · Ho otloloha: 0.005mm
- · Ho tiea ha sekhutlo: 0.005mm
- · Bolelele: 0.002mm
- · Ho tsepamisa mohopolo: 0.01mm
