Poleiti ea Ceramic ea Alumina e Hloekileng Haholo – bakeng sa ho Sireletsa le ho Sireletsa Mocheso o Phahameng
Poleiti ea letsopa ea St.Cera e entsoe ka alumina ea 99.8% e hloekileng haholo (Al₂O₃), e fanang ka matla a phahameng a dielectric (15×10⁶ V/m), botsitso ba mocheso ho fihlela ho 1600°C, le ho hanyetsa ho tsofala ho hoholo. Lipoleiti li hokahantsoe ka nepo ho fihlela ho batalla ≤5 μm ho feta 100 mm le ho hlaka ha bokaholimo ba Ra ≤0.4 μm. E fumaneha ka botenya bo tloaelehileng ho tloha ho 1 mm ho isa ho 20 mm, boholo bo ikhethileng ho fihlela ho 500×500 mm. E sebelisoa e le li-insulator tsa motlakase, li-heater base, li-chamber liners le li-vacuum chuck substrates.
Litlhaloso (li ipapisitse le 99.8% Al₂O₃):
| Thepa | Boleng |
| Thepa | 99.8% Alumina (Lenaka la tlou) |
| Botenya | 3.93 g/cm³ |
| Matla a ho Tenyetseha | 361 MPa |
| Matla a Dielectric | 15×10⁶ V/m |
| Khanyetso e Ikhethang | >10¹⁴ Ω·mm²/m |
| Ho khanna ha mocheso | 32 W/m·k |
| Katoloso ea Thermal (25-1000°C) | 7.2×10⁻⁶/℃ |
| Mocheso o Phahameng oa Ts'ebetso | 1600°C |
| Bophara (ka 100 mm) | ≤5 μm |
| Mamello ea Botenya | ± 0.05 mm |
| Bokakang ba Bokaholimo | Ra ≤0.4 μm |
Likopo:
- · Lipoleiti tsa ho thibela motlakase tse sebelisoang lisebelisoa tse nang le motlakase o phahameng
- · Lipoleiti tsa tšehetso ea hitara ka har'a liontong tsa ho hasana
- · Li-liner tsa kamore bakeng sa CVD/PVD
- · Lipoleiti tsa motheo bakeng sa li-chuck tsa vacuum
Melemo:
- · Ho monya metsi ka 0% – ha ho na ho ntsha gase ka har'a vacuum
- · Ha e na lik'hemik'hale - e hanela li-acid le li-halogen (ntle le HF)
Ho iketsetsa:
Mekoti, li-cutout, ho potoloha mathōko le ho etsa tšepe lia fumaneha.
