Ha e kopantsoe le melemo ea ts'ebetso e felletseng ea lisebelisoa tsa khale tsa Al2O3 le BeO, ceramic Nitride(AlN) ceramic, e nang le conductivity e phahameng ea mocheso (monocrystal's theoretical thermal conductivity ke 275W/m▪k, polycrystal's theory conductivity thermal conductivity is 70~k210W/m. ), dielectric tse tlase, coefficient ea katoloso ea mocheso e tsamaellanang le silicon e le 'ngoe ea kristale, le thepa e ntle ea ho kenya motlakase, ke thepa e loketseng bakeng sa li-substrates tsa potoloho le ho paka indastering ea li-microelectronics.Hape ke thepa ea bohlokoa bakeng sa likarolo tse phahameng tsa mocheso oa ceramic ka lebaka la thepa e ntle ea mocheso o phahameng, thepa ea mocheso le botsitso ba lik'hemik'hale.
Theory of density of AlN is 3.26g/cm3, the MOHS hardness ke 7-8, the room-temperature resistivity is great than 1016Ωm, and the thermal expansivity is 3.5×10-6/℃ (mocheso oa phaposi ea 200℃).Li-ceramics tse hloekileng tsa AlN ha li na 'mala ebile lia pepenene, empa li ka ba mebala e fapaneng joalo ka bohlooho, bosoeu kapa bosehla bo bobebe, ka lebaka la litšila.
Ntle le ts'ebetso e phahameng ea mocheso, li-ceramics tsa AlN le tsona li na le melemo e latelang:
1. Tšireletso e ntle ea motlakase;
2. Coefficient e ts'oanang ea ho atolosa mocheso le silicon monocrystal, e phahametseng lisebelisoa tse kang Al2O3 le BeO;
3. Matla a phahameng a mechine le matla a tšoanang a flexural a nang le lik'hemik'hale tsa Al2O3;
4. Tahlehelo e itekanetseng ea dielectric kamehla le dielectric;
5. Ha ho bapisoa le BeO, mocheso oa mocheso oa li-ceramics tsa AlN ha o amehe haholo ke mocheso, haholo-holo ka holimo ho 200 ℃;
6. Ho hanyetsa mocheso o phahameng le ho hanyetsa kutu;
7. E seng chefo;
8. E sebelisetsoe indastering ea semiconductor, indasteri ea metallurgy ea lik'hemik'hale le likarolo tse ling tsa indasteri.
Nako ea poso: Jul-14-2023